Laboratory Vacuum DC Sputter Coater Coating Machine with Max Sputtering Current of 0-20mA
Introduction
Ion Sputtering Coater (SD900 Model) is ideal and designed for lab SEM sample preparation. It is widely used to coat non-conductive SEM samples with Au for better imaging. It is also excellent for surface treatment.
Working vacuum pressure can be achieved quickly within 2 minutes when using proper vacuum pump. It generates much less heat. It is user friendly and easy to operate.
Vacuum pump is included.
Parameter
Vacuum pump set
(Oil required) rotary vacuum pump
Rotary pumping speed
50 Hz : 8 m³/h (2.2 L/s)/ 60 Hz : 9.6m³/h (2.6 L/s)
Vacuum limit
2Pa
Max sputtering current
0-20mA
Working pressure
30Pa -7 Pa
Vacuuming time
<5 Min(2 Pa)
Vacuum measure
Measuring range from atmosphere to 2*10-2mbar
Gas control
Gas flow controller
Chamber size
Φ150*120mm (height) scratch resistant quartz glass
Magnetron target source
Target size φ 50*0.1mm(Au)/ target source: Au,Ag,Pt
Operation method
Instruction Manual
Weight/size
45kg/360mm length x 300mm wide x 380mm high
Power supply
AC 110V 60Hz or AC 220V 50Hz
Power consumption
<1500W
Cooling method
Air cooling
Warranty
One year limited warranty with lifetime product suppor