Functional Plasma Vacuum Film Coating Equipment for Workpiece

Functional Vacuum Film Coating Equipment for Workpiece

On the basis of PMA I patented technology, we developed PMA II and EFC patented technology, and successfully integrated PMA II and EFC technology into the new generation of coating system. The system has flexible configuration and can be combined with ARC, MS, HIPIMS and other technologies to provide more possibilities for the development of new coatings and new materials, and provide a complete coating plan for tool coating, mold coating, parts coating, DLC coating, GLC coating, ta-c coating, etc.

It is widely used in scientific research, semiconductor, tools, tools, moulds, parts, medical devices, optics, new energy and other industries. It can be plated with nitride coatings such as AlTiN, TiAlN, AlTiXN, AlCrN, AlCrXN, TiSiN, CrN, TiN, Ta-c, graphite-like, Cr+a-c, Cr+a-c: H, W+a-c, W+a-c: H, and PECVD coatings such as Cr+a-c: H, CrN+a-c: H.

We provide the most advanced PVD, PACVD and other functional coatings with a wide range of product combination technology and equipment, which are used for high-speed steel and cemented carbide workpieces that meet various processing requirements and workpiece materials.

Vacuum coating saves overall processing cost because they allow higher cutting speed, feed and reduced tool replacement time due to longer service life. The low friction performance and hardness of the coating allow to reduce lubrication and cooling, establish predictable wear, and ensure better surface quality of the processed parts.

High performance coating:

High-performance coating is a tool specially designed for high-speed and large-feed processing of tough and rough workpiece materials, with high heat and high mechanical load, minimum or low lubrication and cooling.

Coating value:

Vacuum coatings for many special purposes are processed on HSS and cemented carbide workpieces, which are important parts for cutting metal, plastic, composite materials and other materials including wood. They provide high efficiency, extend the service life of the workpiece and reduce the overall cost.

Main modules

ArcHiPIMS innovative APA evaporator technology (advanced plasma assisted) is based on cathode vacuum arc, which provides a variety of development possibilities for new layer structures.

Advantages:

● High utilization rate of target materials, reducing the cost of target materials

● High deposition rate

● Adjustable magnetic field

● Short target replacement time

● High plasma density

● Perfect coating adhesion HiPIMS represents high power pulsed magnetron sputtering.

● High ionization rate (similar to arc method)

● High power density, from 100 to 1000 W/cm2

● Very high plasma density

● Layer structure can be adjusted through plasma parameter setting

● The coating is very smooth

● Perfect coating adhesion

● Depositing dense coating at low substrate temperature Other modules

Sputtering nitriding In the sputtering process, high-energy ion (Ar) bombards the target material, separates into atoms and then converts into gas phase. The coating is deposited on the substrate by combining the sputtering material and other gases.

Advantages:

● Able to sputter multiple materials

● Multiple process variables are available

● Smooth coating

● The nitriding module can be used in combination with the power etching process AEGD to obtain good coating adhesion. The plasma nitriding process can be carried out in the same system, in the same batch, before the PVD and/or PACVD coating process. A hardened layer is thus generated to provide perfect support for the subsequent PVD/PACVD coating.

● Optimize tool and component attributes

● Replace expensive substrates

● Significantly prolong life

● All PVD coatings can be applied

DLCta-CDLC is diamond-like coating, which refers to a series of amorphous carbon coatings with ultra-low friction coefficient. Using DLC module, different DLC coatings can be generated by using PVD and/or PACVD process. Standard DLC coatings include metal-free or metal-containing carbon-based coatings.

Advantages:

● Perfect coating adhesion

● High wear resistance

● Low friction coefficient

● Smooth coating ta-C refers to tetrahedral amorphous carbon without hydrogen, which refers to a group of extremely hard and low friction amorphous carbon coatings. Different ta-C coatings can be produced by using ta-C module.

● Suitable for higher temperature environment than DLC

● Very high wear resistance

● Perfect coating adhesion

● Smooth coating