Auto Vacuum DC Sputtering Targets Coating Machine Coater for Battery and Thin Film
Introduction
Compact Automatic Ion Sputtering Coater (SD800 Model) is ideal and designed for lab SEM sample preparation. It is widely used to coat non-conductive SEM samples with Au for better imaging. It is also excellent for surface treatment.
Working vacuum pressure can be achieved quickly when using proper vacuum pump. It generates much less heat. It is user friendly and easy to operate using Time Control.
Vacuum pump is included.
Parameter
|
Vacuum pump set |
(Oil required) rotary vacuum pump |
|
Rotary pumping speed |
50 Hz : 8m³/h (2.2 L/s)/ 60 Hz : 9.6m³/h (2.6 L/s) |
|
Vacuuming time |
< 2 Min |
|
Chamber size |
Φ115*100mm (height) scratch resistant quartz glass |
|
Magnetron target source |
Target size φ 50*0.1mm(Au)/target source: Au,Ag,Pt |
|
Operation method |
Instruction Manual |
|
Weight/size |
40kg/307mm length x 260mm wide x 260mm high |
|
Power supply |
AC 110V 60Hz or AC 220V 50Hz |
|
Power consumption |
<1500W |
|
Cooling method |
Air cooling |
|
Warranty |
One year limited warranty with lifetime product support |
